CLEANING METHOD AND CLEANING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To clean a work with high cleaning efficiency. SOLUTION: This cleaning method comprises carrying out surface treatment, for example, polishing the surface of the work such as a magnetic disc substrate and then cleaning the work for removing foreign matter or the like deposited on the surface of the work. The respective works W are put into plural cleaning tanks 11-14 and conveyed at prescribed intervals by a conveyor 20 and cleaned while exposed to the liquid in the tanks. The work picked up one by one from each of the tanks 11-14 is scrubbed/washed one by one by a rotary brush of a scrubbing/cleaning machine provided at each of the scrubbing/cleaning positions 16-19. The treatment in the cleaning tank and the treatment by the scrubbing/cleaning machine are repeated plural times. The work thus cleaned is dried immediately by a spin dryer.