TREATMENT AGENT DISSOLUTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a treatment agent dissolution apparatus provided with a filter which requires no maintenance for a long duration. SOLUTION: A filter cover 252 is installed in the outside of a cylindrical filter part 260 and a filter 256 is installed in the inside while keeping a proper gap. A vertical groove 254 is formed in the filter cover 252 as to be parallel to the cylinder? axis 262 of the filter part 260 and a produced treatment liquid is taken in the inside of the filter part 260 through the vertical groove 254. The filter part 260 is installed in a filter attachment part 250 so as to set the cylindrical axis 262 in the perpendicular direction.