| 摘要 |
PROBLEM TO BE SOLVED: To form a carbon-coating layer that has high adhesion to the surface of a substrate made of PET and a suitable degree of the hardness. SOLUTION: A coating layer of carbon or a mainly carbon-comprising substance is formed on the surface of a substrate made of PET by sputtering with such a self-bias range that the surface to be coated may not be damaged by the sputtering, then high-frequency energy is gradually increased to raise the hardness of the carbon-coating layer. |
