发明名称 |
Focused ion beam formation of angled optoelectronic devices |
摘要 |
Fabrication of an optoelectronic device is enhanced by using a focused ion beam to prepare one or more of the device's facet surfaces. In particular, a facet may be oriented at a nearly arbitrary angled with respect to the waveguide within the device by controlling the orientation between the focused ion beam source and the device waveguide. Such facets are useful as antireflection and refractive beamsteering surfaces.
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申请公布号 |
US6214178(B1) |
申请公布日期 |
2001.04.10 |
申请号 |
US19980218566 |
申请日期 |
1998.12.22 |
申请人 |
LUCENT TECHNOLOGIES, INC. |
发明人 |
CHAKRABARTI UTPAL KUMAR;PEALE DAVID REESE |
分类号 |
H01S5/02;H01S5/028;H01S5/10;(IPC1-7):C23C14/46;H01L21/20;H01L21/306;C03C25/02 |
主分类号 |
H01S5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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