MULTI-SORTER SYSTEM AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A multi-sorter system is provided to reduce time loss by setting up an algorithm for sorting wafer according an increased capacity or change of a product without a separate engineer. CONSTITUTION: A robot control unit drives a robot assembly and an elevator, and loads/unloads a wafer to a cassette. A pre-align unit centers and aligns the loaded wafer. A camera control unit controls a camera which takes a picture of an identification written on a lower surface of the aligned wafer. A main control unit reads the identification of the wafer according to an algorithm loaded as an external input, and unloads the wafer to the cassette through an auxiliary control unit so that the wafers are sorted wherein a cassette slot corresponds to a wafer number according to the identification of the wafer.