CAPACITOR ARRAY OF SEMICONDUCTOR DEVICE IN WHICH CROSS TALK BETWEEN ADJACENT CAPACITORS IS CONTROLLED AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A capacitor array of a semiconductor device is provided to control a cross talk phenomenon between adjacent capacitors, by forming a porous insulating layer or air cap among a plurality of capacitors. CONSTITUTION: A capacitor array of a semiconductor device has a plurality of capacitors. A plurality of storage electrodes(110) are isolated from each other by an insulating layer having low dielectric pores to isolate adjacent capacitors from each other, formed on a semiconductor substrate. A dielectric layer(120) is formed on the storage electrodes. A plate electrode(130) is formed on the dielectric layer.