ELECTRODE/WIRING MATERIAL FOR LIQUID CRYSTAL DISPLAY AND SPUTTERING TARGET

摘要

PROBLEM TO BE SOLVED: To provide an electrode/wiring material for a liquid crystal display, where the resistance is low (<=10μΩ.cm) and the formation of hillocks is suppressed, and to provide a sputtering target, having a smaller content of Nd in an Al alloy used for fabricating the same electrode/wiring material. SOLUTION: This electrode/writing material for a liquid crystal display is composed of an Al alloy which contains 0.5-1.0 at.% of Nd, 100 ppm or less of oxygen, and the balance of Al and inevitable impurities. The sputtering target is also composed of the same Al alloy for fabricating the electrode/wiring material.