ALIGNING APPARATUS FOR ION IMPLANTING

摘要

PURPOSE: An aligning apparatus for ion implanting is to perform a position aligning operation between a wafer and an ion generating portion using an optical sensor in which current amount is varied according to light amount. CONSTITUTION: A power portion(20) converts AC power input from an outside into DC power, and then outputs the DC power. A light emitting portion(30) receives operating power from the power portion to radiate light. An electrode(60) has a hole(61) through which the light generated from the light emitting portion is passed. A light receiving portion(40) detects an amount of the light passing through the hole formed at the electrode. A displaying portion(50) displays the light amount detected by the light receiving portion. A lamp is used as the light-emitting portion. The light-receiving portion is a phototransistor, which is operated by the light passing through the hole. The electrode is disposed between the light emitting portion and the light receiving portion to block the light generated from the light emitting portion.