| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing electronic components which is improved in effective floor area ratio, etc. SOLUTION: This apparatus has a transport machine, which moves on a rail disposed at the ceiling, puts cassettes 5 in a cassette container 8 and transports it to carry in/out chamber 6, and a means 9 disposed in the carry in/out chamber 6 for lifting the cassettes 5 carried with the cassette container 8, and comprises a transporting means for taking only one of substrates 1 horizontally from the cassette 5 at an approximately fixed horizontal position and transferring it out to a load lock chamber 3. |
