| 摘要 |
PURPOSE: A wafer loading apparatus is provided to prevent a fall of a wafer or a collision with a robot arm owing to a shaking movement of a support ring. CONSTITUTION: The wafer loading apparatus includes a lower ring(12a) and an upper ring(12b) for supporting the wafer. The support rings(12a,12b) are spaced apart from each other by a supporter(13) and shaped like a circle. In addition, each of the support rings(12a,12b) has at least three ring pins holding a periphery of the wafer. The lower support ring(12a) is placed onto a plate(18) joined to a shaft(11). The plate(18) has a circular or semicircular shape. In particular, the support rings(12a,12b), the supporter(13) and the plate(18) are fastened altogether by two fastening screws(15). Accordingly, the involuntary shaking movement of the support rings(12a,12b) is prevented, and thereby a reliable loading of the wafer is made possible.
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