CRYSTAL DEFECT ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide a crystal defect analyzer providing only information related to a defect calculating accurate defect size and depth and facilitating the crystal evaluation. SOLUTION: An in-plane distribution display result of a defect or foreign matter on a sample surface and haze distribution display are comparatively displayed on the same screen, and those of inaccurate size and depth are colored and displayed in the distribution in a defect screen, so that the accurately measured defects are clearly displayed.