APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An apparatus for manufacturing a semiconductor device is provided to reduce vortex of gas inside a reactor, by making the inside of the reactor spherical. CONSTITUTION: A reactor supplies a reaction space isolated from the exterior. A pumping port exhausts gas of the reactor. An inside of the reactor is a spherical type. The pumping port is located in a lower end portion of the reactor. The inside of the lower portion of the reactor is composed of a hemispherical chamber, and the upper portion is composed of a quartz dome.