PROBE STATION FOR INSPECTING SEMICONDUCTOR WAFER

摘要

PURPOSE: A probe station for inspecting a semiconductor wafer is provided to prevent a fiducial mark of a reference unit from being affected even if a chuck is contracted and expanded by temperature variation, by making the probe station coupled between the chuck and a lifter, and by having an upper portion of the reference unit separated from an outer circumferential surface of the chuck by a predetermined distance. CONSTITUTION: A wafer is loaded on a chuck(10). A reference unit(22) is installed in a side of an outer circumferential surface of the chuck, wherein an upper surface of the reference unit is flat. A lifter(14) vertically elevates the chuck. A probe station for inspecting a semiconductor wafer is detachably coupled between the chuck and the lifter so that the reference unit is not affected by temperature variation of the chuck.