METHOD AND APPARATUS FOR TESTING ELECTROSTATIC BREAKDOWN OF ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To realize an electrostatic breakdown test of an electronic device which can raise the measurement reliability of the breakdown resistance of the electronic device against the electrostatic discharge. SOLUTION: A sample device 200 is settled on a charging plate 110 and contacted at one end 201e to a contact needle 101. A grounded switch SW2 connected to the contact needle 101 is set on for a specified time to remove charges from the sample device 200 and a grounded switch SW3 is set on for a specified time to remove charges from the charging plate 110 through a high resistance 21. After completing the charge removal, a high voltage from a high voltage source E is applied through the high resistance 21 to the sample device 200 to induce and take unipolar charges on the sample device 200, and then the switch SW2 is set on to discharge the unipolar charges stored on the sample device 200.