Positionsmeßsystem mit integriertem Beschleunigungssensor

摘要

The electrically conductive measuring structure (1) of the acceleration sensor which functions according to the Ferraris principle, also supports the material measure (2) for carrying out a position measurement. In order to provide a space-saving construction, the measuring structure (1) and the material measure (2) are arranged in an overlying manner on a common area.