发明名称 |
Anti-notch thinning heater |
摘要 |
The invention provides an apparatus for excluding unwanted deposition at the edge of a substrate which prevents excess purge gas from flowing over the surface of the substrate at the region adjacent a notch on a substrate. Another aspect of the invention provides a wider purge gas channel that prevents excess purge gas from flowing over the surface of the substrate. Still another aspect of the present invention provides a purge gas guide that includes a notch therein to prevent excess purge gas from adversely affecting deposition at the vicinity of the substrate notch.
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申请公布号 |
US6210483(B1) |
申请公布日期 |
2001.04.03 |
申请号 |
US19980203419 |
申请日期 |
1998.12.02 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
TSAI KEN;GHANAYEM STEVE;YUDOVSKY JOSEPH;LAI KEN |
分类号 |
C23C16/44;C23C16/455;H01J37/32;(IPC1-7):C23C16/00;H05H1/00 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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