ELECTRICALLY CONDUCTIVE CERAMIC AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To produce electrically conductive ceramics of which electric conductivity can be changed over a wide range and having reduced unevenness in the electric conductivity and to produce electrically conductive ceramics each less liable to change in electric conductivity and stably usable even in a severe atmosphere, e.g. in a plasma environment or in a heated oxidizing atmosphere. SOLUTION: Each of the electrically conductive ceramics contains a compound containing at least one element belonging to the group IIIA of the Periodic Table and 1-90 wt.% TiO2-x (0