发明名称 All-alkoxide synthesis of strontium-containing metal oxides
摘要 A method for making strontium-containing metal-oxide ceramic thin films from a precursor liquid by mixing a strontium neo-pentoxide dissolved in an amine solvent and at least one metal alkoxide dissolved in a solvent, said at least one metal alkoxide selected from the group consisting of alkoxides of calcium, barium, bismuth, cadmium, lead, titanium, tantalum, hafnium, tungsten, niobium, zirconium, yttrium, lanthanum, antimony, chromium and thallium, depositing a thin film of the precursor liquid on a substrate, and heating the thin film in the presence of oxygen at between 550 and 700° C.
申请公布号 US6210752(B1) 申请公布日期 2001.04.03
申请号 US19990275897 申请日期 1999.03.24
申请人 SANDIA CORPORATION 发明人 BOYLE TIMOTHY J.
分类号 C23C18/12;H01L21/314;H01L21/316;(IPC1-7):B05D3/02 主分类号 C23C18/12
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