摘要 |
PROBLEM TO BE SOLVED: To provide a soft magnetic alloy for an acceleration cavity improved in μp' Qf value. SOLUTION: This soft magnetic alloy for an acceleration cavity has a composition of T100-x-y-z-tMxM'yM"zXt, in which at least >=50% of the structure are composed of fine particles in which the average crystal particle size is controlled to <=30 nm and also subjected to magnetic field heat treatment. A high-frequency acceleration cavity 15 with magnetic cores 34 is composed of the same, and a particle accelerator uses this cavity, wherein T denotes one or >= two kinds of elements among Fe, Ni and Co, M denotes one or >=two kinds of elements among Ti, Zr, Hf, V, Nb, Ta, Mo, W and Mn, M' denotes one or >= two kinds of elements among Cu, Ag and Au, M" denotes one or >=two kinds of elements among Cr, Ru, Rh, Ir, Pd, Os and Pr, and X denotes one or >= two kinds of elements among Si, B, Al, Ge, Ga, P and C, and, as for (x), (y), (z) and (t) expressing the compositional ratios, by atomic %, 1<=x<=30, 0<=y<=3, 0<=z<=10 and 0.5<=t<=30 are satisfied. |