| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem in that since in a conventional quartz glass synthesized with a direct method of using an organic silicon compound as a raw material gas, even at 193.4 nm which is a wave length of an ArF excimer laser, its internal absorption coefficient becomes >=0.005 cm-1, and it can not satisfy a specification as a lens member of the image forming system of the excimer laser stepper. SOLUTION: This quartz glass synthesized with a direct method of using a raw material gas consisting of an organic silicon compound is provided by making <=1×1015 cm-3 CO gas concentration contained in the glass, so as to achieve <=0.005 cm-1 internal absorption coefficient in >=190 nm wave length range.
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