| 摘要 |
PROBLEM TO BE SOLVED: To accurately fix a position by forming a light catalyst at the tip of a member such as a probe body for operating a solution containing a metal ion to evanescent light, reducing and generating a metal fine particle from the metal ion contained in the solution onto the light catalyst being exposed to light for fixing. SOLUTION: A thin film 102 of TiO2 (titanium oxide) is formed as a light catalyst on a probe body 100 that is a tapered member with a sharp tip being formed by SiN. In this case, for forming the thin film 103 of TiO2 on the body 100 as the light catalyst, first Ti(titanium) is sputtered, thus forming a Ti thin film on the surface of the body 100. Then, when the formed body 100 is exposed at approximately 400 deg. in air atmosphere for 10 minutes, the Ti thin film is oxidized to form a transparent TiO2 thin film 102 on the surface of the body 100. When the body 100 where the TiO2 thin film 102 is formed is allowed to enter the region of evanescent light 202 while HAuCl4 solution 200 is being located at an area in that the evanescent light 202 being soaked from a prism 10, a gold fine particle 204 is deposited by the light catalysis operation of TiO2.
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