发明名称 SURFACE ACOUSTIC WAVE FILTER ELEMENT AND ITS MANUFACTURE
摘要 PROBLEM TO BE SOLVED: To obtain a surface acoustic wave filter element that can be miniaturized, whose manufacturing process can be simplified and whose design can relatively easily be conducted. SOLUTION: This surface acoustic wave filter element 10 is configured such that two filter sections, that is, a 1st filter section 20 and a 2nd filter section 30 are formed on the same piezoelectric substrate 11. Each of the filter sections 20, 30 has IDTs(interdigital transducers) and reflectors in a pair. The sections 20, 30 extract high frequency signals with different frequency bands and provide outputs of different output signals. The film thickness of the filter sections 20, 30 with the different pass bands differs from each other. Thus, the degree of design freedom can be extended in comparison with the case that the same film thickness is adopted for the filter sections 20, 30. Since the filter sections 20, 30 with the different pass bands are formed on the same substrate, miniaturization and simplicity of the manufacturing process can be promoted more than the case employing different piezoelectric substrates.
申请公布号 JP2001085967(A) 申请公布日期 2001.03.30
申请号 JP19990260285 申请日期 1999.09.14
申请人 MITSUBISHI ELECTRIC CORP 发明人 TANAKA HIROSHI
分类号 H01L21/461;H01L21/302;H03H3/08;H03H3/10;H03H9/145;H03H9/25;H04B7/26;(IPC1-7):H03H9/145 主分类号 H01L21/461
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