发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF |
摘要 |
PROBLEM TO BE SOLVED: To surely support a bump electrode arranged outside a chip by enhancing reflow resistance in a fan-in/out type of semiconductor device. SOLUTION: This semiconductor device 11 comprises a porous elastomer 3, which is made on the main face 1a of a semiconductor chip 1 and in which an opening 3c for exposing an electrode pad 1b of the semiconductor chip 1 is made, a tape substrate 4 which extends outward the chip from on the main face 1a of the semiconductor chip 1 and whose one end is connected electrically with an electrode pad 1b and whose other end is connected electrically with a bump electrode 2 and in which an opening 4e to expose the electrode pad 1b is made, a frame-shaped reinforcing member 5 which reinforces the support of the bump electrode 2 arranged outside the semiconductor chip 1, and a sealing part 5 which seals the electrode pad 1b of the semiconductor chip 1 and a lead 4c, and the support by the tape substrate 4 of the bump electrode 2 arranged outside the semiconductor chip 1 is reinforced by the reinforcing member 6. |
申请公布号 |
JP2001085565(A) |
申请公布日期 |
2001.03.30 |
申请号 |
JP19990263016 |
申请日期 |
1999.09.17 |
申请人 |
HITACHI LTD;HITACHI ULSI SYSTEMS CO LTD |
发明人 |
AKIYAMA YUKIJI;SHIBAMOTO MASAKUNI;SHIMOISHI TOMOAKI;ARITA JUNICHI |
分类号 |
H01L23/12;H01L21/60;H01L23/28;H01L23/31;H01L23/48;H01L23/498 |
主分类号 |
H01L23/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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