发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To surely support a bump electrode arranged outside a chip by enhancing reflow resistance in a fan-in/out type of semiconductor device. SOLUTION: This semiconductor device 11 comprises a porous elastomer 3, which is made on the main face 1a of a semiconductor chip 1 and in which an opening 3c for exposing an electrode pad 1b of the semiconductor chip 1 is made, a tape substrate 4 which extends outward the chip from on the main face 1a of the semiconductor chip 1 and whose one end is connected electrically with an electrode pad 1b and whose other end is connected electrically with a bump electrode 2 and in which an opening 4e to expose the electrode pad 1b is made, a frame-shaped reinforcing member 5 which reinforces the support of the bump electrode 2 arranged outside the semiconductor chip 1, and a sealing part 5 which seals the electrode pad 1b of the semiconductor chip 1 and a lead 4c, and the support by the tape substrate 4 of the bump electrode 2 arranged outside the semiconductor chip 1 is reinforced by the reinforcing member 6.
申请公布号 JP2001085565(A) 申请公布日期 2001.03.30
申请号 JP19990263016 申请日期 1999.09.17
申请人 HITACHI LTD;HITACHI ULSI SYSTEMS CO LTD 发明人 AKIYAMA YUKIJI;SHIBAMOTO MASAKUNI;SHIMOISHI TOMOAKI;ARITA JUNICHI
分类号 H01L23/12;H01L21/60;H01L23/28;H01L23/31;H01L23/48;H01L23/498 主分类号 H01L23/12
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