| 摘要 |
PROBLEM TO BE SOLVED: To evaluate the orientation state of molecules in a thin film as a sample in a short time without turning an optical element and the sample and to evaluate a very small spot by a method wherein circularly polarized light is incident via a high-numerical-aperture lens and the anisotropy on the surface of a substance is measured based on the intensity of its reflected light. SOLUTION: A laser 1 is used as a light source. Light is passed through an attenuator 2 and a beam expander 3, and it is changed into linearly polarized light by a polarizer 4. The light is bent in the direction of a sample 8 by a semitransparent mirror 5, and the light is changed into circularly polarized light by a quarter-wave plate or an opto-elastic element 6. After the light is passed through a mirror 15, it is incident on the sample 8 by a high- aperture-ratio lens 7. Reflected light from the sample is passed through the mirror, the quarter- wave plate and the mirror, it is received by a CCD camera 11, and its image and data are fetched by a computer 18. A sample state 9 can be moved to the in-plane direction and the vertical direction of the sample, and its inclination can be adjusted. A measuring position is decided by using microscope mechanisms 12 to 17. The mirror 15 can be taken in and out with reference to an optical path, and light which is radiated from a white light source 12 is condensed by a lens 13.
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