摘要 |
PROBLEM TO BE SOLVED: To prevent defective contact due to oxidation by suppressing the temperature rising of an electrode and a terminal part provided on a ceramic base plate and also to improve a fixing property at both end parts of a transfer material in a ceramic heater using the ceramic base plate high in heat conductivity. SOLUTION: This ceramic heater is provided with a heating element 10b and the electrode 10c or the like on the ceramic base plate 10a, and is provided with a glass layer 10e between the ceramic base plate 10a and the beating element 10b. Also, the cross-sectional area of the ceramic base plate 10a may be reduced, or they may be used. The ceramic base plate 10a is desirably made of ceramic whose main component is selected from aluminum nitride, silicon nitride and silicon carbide and whose heat conductivity is excellent.
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