| 摘要 |
PROBLEM TO BE SOLVED: To construct projecting uneven level parts on the reflection electrode and to obtain a function in outward appearance equivalent to formation of uneven parts on the reflection electrode surface by forming it with a metal layer susceptible to anodic-oxidation and providing it with a partly anodized region. SOLUTION: An anodic-oxidation susceptible metal layer, for example an Al layer 40, selected from many such metals as Ta, Ti and Al, is deposited on a principal plane of a glass substrate 2' with a vacuum film forming device such as a sputtering device. A desired photosensitive resin pattern 30 is selectively formed on the Al layer 40 with a photographic etching technique. An alumina layer 41, an oxidized layer, is formed on the exposed surface of the Al layer 40 by anodic-oxidation in a chemical conversion liquid composed of ethylene glycol or oxalic acid using the photosensitive resin pattern 30 as a mask. The oxidized layer 41 is simultaneously formed in the up and down directions of the reference plane of the Al layer 40 and is formed protruding on the Al layer 40 surface in a projecting shape. Namely uneven parts are formed on the Al layer 40 surface. Then the photosensitive resin pattern 30 is removed so as to obtain a reflection electrode 25'. |
