| 摘要 |
PROBLEM TO BE SOLVED: To obtain a load lock chamber which enables reduction of the total width of an apparatus, realizes economical manufacturing cost and has few restrictions with respect to the installation space. SOLUTION: An apparatus for manufacturing semiconductors has a load lock chamber 5. A valve plate 14 is supported by a plate supporter 17, movable relative to the opening part of the load lock chamber. The opening part is opened/shut airtightly by the valve plate 14. A pressing means 65, which press the valve plate 14 against the opening part, are attached to the plate supporter 17. The pressing counter force of the plate supporter 17 is supported by a positive pressure load supporter 59, provided on the load lock chamber at the closing position of the opening part.
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