发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND FABRICATION METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To reduce leakage current of a capacitive element comprising an MISFET(metal insulator semiconductor field effect transistor). SOLUTION: A capacitive element C1 is formed utilizing the storage area of a p-channel MISFET having a gate oxide film 9B thicker than an MISFET at a logic section. A polysilicon film constituting a part of a gate electrode 10E is doped with n-type impurities so that the capacitive element C1 can operate stably even with a low power supply voltage.
申请公布号 JP2001085625(A) 申请公布日期 2001.03.30
申请号 JP19990259460 申请日期 1999.09.13
申请人 HITACHI LTD 发明人 SUZUKI KAZUHISA;TAKAHASHI TOSHIRO;YANAGISAWA YASUNOBU;NONAKA YUSUKE
分类号 H01L27/04;H01L21/822;H01L21/8234;H01L21/8238;H01L21/8242;H01L21/8244;H01L27/06;H01L27/092;H01L27/108;H01L27/11 主分类号 H01L27/04
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