| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily execute operation for collating an electric signal inputted from a control device to a semiconductor manufacturing device with the history information of processing practically executed by the manufacturing device in order to execute the analysis or the like of processing abnormality generated under the control of the manufacturing device. SOLUTION: The semiconductor manufacturing control system is generally composed of a semiconductor manufacturing device 1 for applying various kinds of working operation to a semiconductor wafer group stored in a lot, a host computer 4 for outputting an on-line communication signal 8 for instructing the operation of the device 1, a control device 2 for converting the signal 8 into an electric signal 9 for the device 1, a signal data collection device 5 such as a personal computer for collecting these signals 9, 8, and a storage device 6 for storing signal data.</p> |
