FERROELECTRIC ELEMENT, NON-VOLATILE FEPROELECTRIC MEMORY ELEMENT, INK JET TYPE RECORDING HEAD AND ITS PRODUCTION AS WELL AS INK JET PRINTER

摘要

PROBLEM TO BE SOLVED: To provide a ferroelectric element which exhibits high-frequency response and is drivable at a high speed. SOLUTION: The ferroelectric element has a ferroelectric film held between an upper electrode and a lower electrode. The crystal of the ferroelectric film is a pseudo cubic crystal system or a crystal system in which at least two among the pseudo cubic crystal system, a rhombohedral system or pyramidal quadratic system co-exist and the crystal face parallel to the lower electrode preferentially orients to a (110) face bearing. Since the driving of the ferroelectric element is not accompanied by the rotation of domains by such constitution, the high-speed driving is made possible and the element is capable of exhibiting the high-frequency response.