发明名称 PURE WATER PRESSURE BOOSTING DEVICE FOR SEMICONDUCTOR MANUFACTURING PROCESS
摘要 PROBLEM TO BE SOLVED: To save the power of a pump and increase a safety by controlling the rotating speed of the pump by an inverter while detecting a delivery pressure with a pressure detecting part on the delivery side of the pump for boosting up the pressure of pure water so as to boost and hold a pure water feed pressure to a specified fluid pressure. SOLUTION: The pump 11 of this device 1 comprises a magnet pump without shaft-through part having a pressure detecting part 13 on the delivery side thereof. By the detection signals from the pressure detecting part 13, the rotating speed of the pump 11 is controlled using the inverter 14. Using the pump 11 for controlling this inverter 14, a power loss at the pump 11 can be eliminated and the heating of a motor and pure water temperature rise in the pump 11 can be controlled so as to save energy. Also, by the inverter control, a feed pressure of pure water to a pure water consuming device can be controlled at a constant even if a pressure in a plant pure water main line varies, and the feed pressure can be controlled at a constant even if the consuming amount of pure water is varied.
申请公布号 JP2001082346(A) 申请公布日期 2001.03.27
申请号 JP19990261023 申请日期 1999.09.14
申请人 KITZ CORP 发明人 MIZUNO AKITOSHI;KAZAMA KATSUHIKO
分类号 H01L21/304;F04B49/06;(IPC1-7):F04B49/06 主分类号 H01L21/304
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