发明名称 Method and apparatus for fabricating elongate crystalline members
摘要 A method for fabricating elongate structural members from a unitary blank of crystalline material is provided. The blank has a predetermined length, width, and depth. A first substantially planar cut is made in the blank, the cut extending substantially along the entire length of the blank and substantially less than the entire width of the blank. At east one additional cut is made in the blank, the at least one additional cut extending in the same plane as the first cut, to cut the blank into two pieces. The step of making at least one additional cut can include making a plurality of additional cuts, in one embodiment at least three additional cuts. The cuts can be made using a rotary saw with a blade having diamond-coated cutting surfaces. The saw can be operated with the blade rotating at between 50 rpm and 50,000 rpm, preferably at approximately 4,000 rpm. The blank of crystalline material can be provided as a unitary blank of silicon material. The method of the present invention can be practiced using monocrystalline silicon material or polyaystalline silicon material. In an embodiment, the blank can be provided as a generally cylindrical blank. The step of making a first substantially planar cut and the step of making at least one additional cut can be repeated on each of the two pieces to make four pieces from the original cylinder, and subsequently repeated to yield eight pieces from the original cylinder, each of the eight pieces having a substantially wedge-shaped cross-section.
申请公布号 US6205993(B1) 申请公布日期 2001.03.27
申请号 US19990292496 申请日期 1999.04.15
申请人 INTEGRATED MATERIALS, INC. 发明人 ZEHAVI RAANAN;DAVIS ROBERT
分类号 H01L21/673;(IPC1-7):B28D1/04 主分类号 H01L21/673
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