Method and apparatus for measurement of microscopic electrical characteristics

摘要

The improved method for microscopic measurement of electrical characteristics comprises a standard atomic force microscope (AFM). The AFM includes a pointed, conductively coated tip attached to one end of a softly compliant cantilever arm, also capable of conducting electricity. The other end of the cantilever arm is attached to the top of a piezo-electric z-axis driver which will raise and lower the cantilever arm as the AFM tip is scanned across the surface of a sample. A piezo-electric X-Y scanstage controller may also be provided and connected to the bottom of the z-axis driver. The X-Y scanstage is preferably capable of scanning the movement of the entire system including the Z-axis driver, cantilever arm and AFM tip.