SEMICONDUCTOR WAFER ALIGNMENT SYSTEM AND METHOD FOR ALIGNING WAFER USING THE SAME

摘要

PURPOSE: A semiconductor wafer alignment system and a method for aligning wafer using the same are provided to reduce a damage of a wafer by catching the wafer of a floating state. CONSTITUTION: A table has a spray portion(12) for injecting from a deionized water supply source to an upper direction. A guide portion is installed on the table in order to guide a wafer(16) to a predetermined position. A projection portion(22) is formed around the spray portion(12) in order to store the constant amount of deionized water(10). The projection portion(22) has an opening portion in order to move the wafer(16) to a flowing direction of the deionized water(10). The guide portion includes a left and right guide(18) for catching a left side or a right side of the wafer(16) and a drive portion for controlling an interval of the left and right guide(18).