发明名称 MANUFACTURE OF SAMPLE FOR ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To easily adhere a sample on a metal mesh without breaking an organic film adhered on the mesh without breaking the sample for an electron microscope or without flying and losing the sample. SOLUTION: The method for manufacturing a sample for an electron microscope comprises the steps of forming water droplets 21 made of a pure water on a support base 18 made of a metal mesh 17 in which a collodion film 16 is spread on its surface, adhering the sample 15 to an end of an electrostatic pincette 14 to collect the sample 15, bringing the sample into contact with the droplets 21 to dispose the sample 15 on the base 18, and adhering the sample.
申请公布号 JP2001074621(A) 申请公布日期 2001.03.23
申请号 JP19990254561 申请日期 1999.09.08
申请人 TOSHIBA MICROELECTRONICS CORP;TOSHIBA CORP 发明人 WASHIO NOBUO;SUZUKI NAOHISA
分类号 G01N23/04;G01N1/00;G01N1/28;H01L21/66;(IPC1-7):G01N1/28 主分类号 G01N23/04
代理机构 代理人
主权项
地址