发明名称 VERTICAL TYPE HEAT-TREATING DEVICE
摘要 PROBLEM TO BE SOLVED: To make it possible to perform a heat treatment on a number of workpieces uniformly and rapidly between the surfaces of the workpieces. SOLUTION: A vertical type heat-treating device is constituted into such a structure that a support jig 1, which arrangement-supports a number of workpiece W at a prescribed interval, is housed in a treating container 2 to perform a prescribed heat treatment on the workpieces W under the atmosphere of prescribed treatment gas. In this case, exhaust vents 12a, 12b and 12c to exhaust in the arrangement direction of the workpieces W dividing the exhaust into a plurality of zones are provided in the sidewall of the container 2 and a gas introducing pipe 5 (5a, 5b and 5c) having discharge orifices 13 to send the flow of the treatment gas along each workpiece W at the positions which oppose to the exhaust vents 12a, 12b and 12c, on the pipe 5 is provided holding the workpieces W between the pipe 5.
申请公布号 JP2001077042(A) 申请公布日期 2001.03.23
申请号 JP19990248118 申请日期 1999.09.02
申请人 TOKYO ELECTRON LTD 发明人 TAKADO MAKOTO;TAKEUCHI YASUSHI
分类号 H01L21/22;H01L21/205;(IPC1-7):H01L21/22 主分类号 H01L21/22
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