| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical device and a microscope whose resolution is excellent and whose sectioning effect is excellent, by which time required until obtaining an output image is shortened and the inside of an object to intensively scatter light is observed without adding a fluorescent pigment and is observed by excellent resolution without being affected by vibration or the like and also the lamination structure of an IC pattern formed on a semiconductor wafer is observed. SOLUTION: A light source 17, an illuminating optical system 21, an image formation optical system 4, an aperture member 12 that possesses an aperture area formed of an area through which the light is transmitted and the area by which the light is shielded and is rotatable, multiplexer and demultiplexer means 10 and 23, a polarizing and extracting means 11, an imaging device 6, image processors 15 and 16 a phase changing device 14 are provided, and a differential image is formed by executing difference calculation for each pixel from at least two differential interference images in which the phase difference amounts of the polarizing components are nearly same and whose signs are different.
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