发明名称 METHOD FOR MANUFACTURING THIN FILM SOLAR CELL AND PROCESSING DEVICE USED FOR THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To realize a method for manufacturing a thin film solar cell which is capable of comparatively easily obtaining data as to the stabilization efficiency of a solar cell on time in a manufacturing process and feeding back them quickly to a manufacturing process resting on the evaluation of cell characteristics. SOLUTION: The method for manufacturing a thin film solar cell comprises a first process where thin films such as a metal electrode layer, a photoelectric conversion layer, a light transmitting electrode and the like are formed, a second process where solar cells connected in series are formed by patterning, and a third process where the characteristics of a solar cell are checked. In this case, an efficiency stabilizing process where a solar cell is subjected to a photo- deterioration treatment is provided as a pre-process carried out preceding the above characteristics check process. A photo-deterioration treatment device is equipped with a thin film solar cell feed roll 31, a take-up roll 35, a transfer means which gives a prescribed tension to the thin film solar cell, and a thin film solar cell cooling means 33.</p>
申请公布号 JP2001077384(A) 申请公布日期 2001.03.23
申请号 JP19990248477 申请日期 1999.09.02
申请人 FUJI ELECTRIC CO LTD 发明人 HAMA TOSHIO
分类号 H01L31/04;(IPC1-7):H01L31/04 主分类号 H01L31/04
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