发明名称 SEMICONDUCTOR PHOTO-DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor photo-device in which the sensitivity can be upgraded. SOLUTION: A base body 2 comprises a substrate 11 of p-type single- crystalline silicon wafer and an epitaxial layer 12 of n-type single-crystalline silicon formed on a surface of the substrate 11. An isolation layer 4 is composed of p-type single-crystalline silicon, and is formed in a specified position of the epitaxial layer 12 piercing from the surface of the layer 12 to the substrate 11. A part of the epitaxial layer 12 surrounded by the isolation layer 4 constitutes a light receiving part 3. An embedded layer 5 is embedded by exposing itself on the surface of the light receiving part 3. The embedded layer 5 has a hole part 5a and a plurality of groove parts 5b. Each groove 5b is formed in a slit shape constituting a longitudinal hole. For this reason, each groove 5b forms a window 14 of an approximately rod shape, which is composed of the light receiving part 3.
申请公布号 JP2001077400(A) 申请公布日期 2001.03.23
申请号 JP19990245575 申请日期 1999.08.31
申请人 TOKAI RIKA CO LTD 发明人 MINAGAWA TORU;IWATA HITOSHI
分类号 H01L31/10;(IPC1-7):H01L31/10 主分类号 H01L31/10
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