发明名称 |
FABRICATION OF HIGHLY TEXTURED LITHIUM COBALT OXIDE FILMS BY RAPID THERMAL ANNEALING |
摘要 |
Systems and methods are described for fabrication of highly textured lithium cobalt oxide films by rapid thermal annealing. A method of forming a lithium cobalt oxide film includes depositing a film of lithium cobalt oxide on a substrate; rapidly heating the film of lithium cobalt oxide to a target temperature; and maintaining the film of lithium cobalt oxide at the target temperature for a target annealing time of at most, approximately 60 minutes. The systems and methods provide advantages because they require less time to implement and are, therefore less costly than previous techniques. |
申请公布号 |
WO0120696(A1) |
申请公布日期 |
2001.03.22 |
申请号 |
WO2000US24558 |
申请日期 |
2000.09.07 |
申请人 |
UT-BATTELLE, L.L.C.;BATES, JOHN, B. |
发明人 |
BATES, JOHN, B. |
分类号 |
C01G51/00;H01M4/04;H01M4/131;H01M4/48;H01M4/485;H01M4/52;H01M4/525 |
主分类号 |
C01G51/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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