发明名称 Vorrichtung mit einem System zur Kompensierung der Verformung eines Abschnittes eines optomechanischen oder mikromechanischen Systems
摘要 An optical switch has an incoming microguide (32) which traverses a beam (26). The beam is fixed at one end and free at the other end and at the free end the incoming microguide (32) may face one or other of two further microguides (20,21). Switching to the outgoing microguide (20,21) arises from the deflection of the beam (26) which is caused by electrical circuits (40,48). The free end of the beam (26) is attached to the fixed surround (8) by U shaped arms (50,52) whose ratio of height to width inhibits vertical movement but facilitates the horizontal switching motion.
申请公布号 DE69518052(T2) 申请公布日期 2001.03.22
申请号 DE1995618052T 申请日期 1995.11.07
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE, PARIS 发明人 LABEYE, PIERRE;OLLIER, ERIC
分类号 G01L1/24;G01P15/093;G02B6/35;(IPC1-7):G01P15/08;G02B26/02 主分类号 G01L1/24
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