SUBSTRATE WITH TRANSPARENT ELECTRICALLY CONDUCTIVE ITO FILM AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To ensure superior chemical resistance and adhesion by disposing a metal oxynitride film on a surface-nitrided organic resin film. SOLUTION: A color filter 3, a silicon oxynitride film 4 and a transparent electrically conductive ITO film 5 are successively disposed on a glass sheet 2 as a transparent substrate to obtain the objective substrate 1. The color filter 3 consists of color filter pixels 3a disposed on the glass sheet 21 and comprising an organic resin layer containing a colorant consisting of a pigment and a dye and an organic resin film 3b for leveling off projecting and recessing parts occurring between the pixels 3a. Anitrided region 3c formed by implanting nitrogen is partially or wholly present in the surface of the organic resin film 3b. The organic resin film 3b and the silicon oxynitride film 4 are allowed to the adhere tightly by the nitrided region 3c. Since the surface of the organic resin film 3b is nitrided and the metal oxynitride film 4 is interposed between the organic resin film 3b and the ITO film 5, high chemical resistance and adhesion are ensured.