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发明名称
Ion source and operation method thereof
摘要
申请公布号
GB0102633(D0)
申请公布日期
2001.03.21
申请号
GB20010002633
申请日期
2001.02.02
申请人
NISSIN ELECTRIC CO LTD
发明人
分类号
H01J27/04;H01J27/08;H01J37/08
主分类号
H01J27/04
代理机构
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