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发明名称
Polymer and resist material
摘要
申请公布号
EP0789279(B1)
申请公布日期
2001.03.21
申请号
EP19960309141
申请日期
1996.12.13
申请人
WAKO PURE CHEMICAL INDUSTRIES, LTD
发明人
URANO, FUMIYOSHI;FUJIE, HIROTOSHI;OONO, KEIJI
分类号
C08F212/14;G03F7/004;G03F7/039;(IPC1-7):G03F7/039;C08F112/14;C08F12/14
主分类号
C08F212/14
代理机构
代理人
主权项
地址
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