| 摘要 |
An acceleration sensor element comprises a weight; a support having a hollow part, which is disposed around the weight as a center; and a flexible plate having piezoelectric elements in which a piezoelectric body is sandwiched by at least one set of electrodes, which is disposed horizontally across the support to suspend the weight at the hollow part of the support, wherein the acceleration applied from the exterior is converted to the deflection of the flexible plate based on the movement of the weight corresponding to the acceleration, and the direction and the rate of the acceleration are three-dimensionally determined from the electric charges generated from the piezoelectric body corresponding to the deflection of the flexible plate. The piezoelectric elements are disposed to be continuously constructed over the flexible parts of the flexible plate from the upper part of the weight and/or the support at the plane of projection seen from the upper part of the flexible plate. An acceleration-sensor-element manufacturing method comprises a first step of laminating and compression bonding a green sheet of the configuration in cross section of a weight, a support, and a flexible plate to form a laminated layer, a second step of integrally sintering the laminated layer to form a sintered body, and a third step of forming the piezoelectric elements by a thick-film method and sintering them. <IMAGE> <IMAGE> |
