Hybrid integrated circuit for a gas sensor

摘要

A hybrid integrated circuit of a gas sensor, comprising a substrate (1) in the form of a ring-shaped peripheral portion (2) and a disk-shaped central portion (3), both being interconnected through three jumpers (4) spaced 120° apart and having three branchings (10) arranged at 120° at the peripheral portion (2). The central portion (3) carries a gas-sensitive film (7), a film heater (6), and a film electrode (8) of the circuit for measuring the resistance of the gas-sensitive film (7). The heater (6) and the electrode (8) are electrically connected along the jumpers (4) to bonding pads (5) located in the peripheral portion (2). The thickness of the jumpers (4) and of the central portion (3) is 0.15-0.25 mm, and the width of the jumpers (4) is 0.05-0.15 mm.