发明名称 HARDENABLE COMPOSITION
摘要 PROBLEM TO BE SOLVED: To obtain a hardenable composition for an etching resist giving a hardened film superior in etching resistance, alkali solubility peelability and pattern forming property, even in secondary etching at a high temperature. SOLUTION: The hardenable composition consists essentially of a compound, having one carboxyl group and one (meth)acryloyl group per molecule and a di (meth)acrylate obtained by esterifying (meth)acrylic acid with a dihydric alcohol, to which two or three alkylene oxide units based on one molecule of bisphenol A have been added.
申请公布号 JP2001066771(A) 申请公布日期 2001.03.16
申请号 JP19990242926 申请日期 1999.08.30
申请人 TOAGOSEI CO LTD 发明人 IGARASHI ICHIRO;MIZUTANI KUNIHIKO
分类号 H01J9/14;C08F2/48;C08F220/20;C08F220/26;G03F7/027;G03F7/36 主分类号 H01J9/14
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