| 摘要 |
PROBLEM TO BE SOLVED: To stably and accurately supply a raw material. SOLUTION: Pressure gages 4a, 4b, 4c specify the raw material vapor pressures in raw material containers 1a, 1b, 1c. Controllers 2a, 3a control the temp. of the raw material container 1a so as to attain a specified raw material vapor pressure in the raw material container 1a, based on the measured value by the pressure gage 4a. Controllers 2b, 3b control the temp. of the raw material container 1b based on the measured value by the pressure gage 4b, and controllers 2c, 3c control the temp. of the raw material container 1c based on the measured value by the pressure gage 4c.
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