| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to considerably shorten the exchange time of nonlinear optical crystals and to exchange the annealed nonlinear optical crystals in a good state. SOLUTION: Plural crystal holders 3 housing the nonlinear optical crystals 4 and 4a are placed and fixed onto moving base 10 movable in an arrow direction. The crystal holders 3 and 3a have heating means for heating the nonlinear optical crystals 4 and 4a. The nonlinear optical crystal 4 placed and fixed onto the moving base 10 is inserted into an optical path of a laser beam and the workpiece is irradiated with the laser beam released from a laser beam source 1, by which the workpiece is subjected to processing, such as perforating. The nonlinear optical crystals 4a housed in the crystal holder 3a is heated to an annealing temperature and is annealed during this time. When the time for exchanging the nonlinear optical crystal 4 comes, the moving base 10 is moved to detach the used nonlinear optical crystal 4 from the inside of the optical path of the crystal holders 3 and the annealed nonlinear optical crystal 4a is inserted into the laser optical path.</p> |
