| 摘要 |
<p>PROBLEM TO BE SOLVED: To enhance the ionization rate of an ion molecular reaction necessary in a reaction section chamber by providing a vacuum section chamber, a reaction section chamber, a feeding part of an analyzed object to the reaction section chamber, and a discharging part for discharging the analyzed object, separating the reaction section chamber from the vacuum section chamber by a gas-impermeable partition, and composing a negative electrode of an acceleration passage by disposing a non-emissive electron source in the vacuum section chamber. SOLUTION: In this ionization chamber, by using a positive electrode of an acceleration part as an X-ray anode in the vacuum section chamber or as a surface of the partition in some cases, X-ray light generated by colliding electrons reaches the partition in the direction of the reaction section chamber, the partition is substantially impermeable for an electron having kinetic energy provided by an acceleration voltage, but is permeable for the X-ray light generated from the X-ray anode, and one or more electrodes each used as a surface of the partition in some cases in the reaction section chamber generate photoelectrons from the X-ray light passing the partition. Preferably, the partition is formed of beryllium, having a thickness of 10-200μm. The ionization chamber has a high ionization rate and a long service life.</p> |
